Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1990-03-07
1991-08-06
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
335210, H01J 322
Patent
active
050380451
ABSTRACT:
The lens is formed by the association of two electromagnetic lenses sharing one and the same magnetic circuit crossed by one and the same central channel. The first lens is a shielded lens and has an annular gap at one of its ends. This annular gap cuts the central channel along a direction the plane of which is perpendicular to the optical axis. The second lens is a single-pole lens surrounding the annular gap of the first lens. It has an annular gap demarcated by two lips, the walls of which have shapes generated by revolution around the optical axis. Induction coils enable the magnetic flux of the gaps to be made to vary.
REFERENCES:
patent: 4419581 (1983-12-01), Nakagawa
Patent Abstracts of Japan, vol. 9, No. 219; Sep. 6, 1985, JP 60-79653.
Patent Abstracts of Japan, vol. 8, No. 209, Sep. 22, 1984; JP 59-94350.
Rouberol Jean-Michel
Tong Mathias
Berman Jack I.
Cameca
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