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Charged particle radiation therapy

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged particle sources

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged particle system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged particle therapy apparatus and charged particle...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Charged particle therapy system, range modulation wheel...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Charged particle-beam exposure device and charged-particle-beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-beam exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-beam exposure system and charged-beam exposure method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam drawing data creation method, and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam exposure apparatus and device...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam exposure apparatus and device...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam exposure apparatus, charged-particle...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam exposure method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam exposure method and apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam irradiation apparatus,...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Charged-particle beam lithographic system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam lithography apparatus and system...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam optical apparatus for imaging a mask on a

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam optical apparatus for irradiating a specim

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged-particle beam optical apparatus for the reduction imagin

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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