Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1975-09-26
1977-05-03
Smith, Alfred E.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250398, H01J 3700
Patent
active
040216748
ABSTRACT:
An improved charged-particle beam optical apparatus for the irradiation of a specimen in a two-dimensional pattern having first areas which are unexposed to the particle beam and are surrounded at least almost entirely by second areas which are exposed to the beam. The improvement of the invention comprises a mask disposed in the path of the beam which is uniformly irradiated by the beam and has apertures disposed therein in an arrangement corresponding to the two-dimensional pattern. A support grid comprising a plurality of spaced-apart, parallel strip members is disposed beneath the mask and at least in engagement with the portions thereof which correspond to the unexposed areas of the two-dimensional pattern. Deflection means laterally deflect the image of the mask and the strip members projected onto the specimen in a direction approximately perpendicular to the longitudinal axes of the strip members at least through a distance which is equal to the width of the strip members.
REFERENCES:
patent: 3440466 (1969-04-01), Colvin et al.
patent: 3614423 (1971-10-01), Heynick et al.
patent: 3736425 (1973-03-01), Chernow
Anderson B. C.
Siemens Aktiengesellschaft
Smith Alfred E.
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