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Biomarker generator

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Blackbody radiation source for producing constant planar energy

Radiant energy – Irradiation of objects or material
Patent

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Blanking aperture array type charged particle beam exposure

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Block mask and charged particle beam exposure method and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Bolt and semiconductor manufacturing apparatus

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Boron ion sources for ion implantation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Bright beam method for super-resolution in e-beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Broad beam flux density control

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Broad beam ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Broad range ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Bulk gas delivery system for ion implanters

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Bulk material irradiation system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Calibration patterns and techniques for charged particle project

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Calorimetric dose monitor for ion implantation equipment

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Capacitor charging sensor

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Cartridge product irradiator

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Cassette improved to reduce particle contamination of reticles d

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Cell projection using an electron beam

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Central dryer for electron beam curing

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Channel for transport of electron beam from accelerator to...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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