Cassette improved to reduce particle contamination of reticles d

Details Cassette improved to reduce particle contamination of reticles d Cassette improved to reduce particle contamination of reticles d

1987-12-18

1989-07-25

Fields, Carolyn E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504421, 378 34, H01L 2130

Patent

active

048516929

ABSTRACT:
A means of improving an E-beam lithography system cassette to reduce wear of contaminating particles from the cassette whereby frictionally engaged surfaces of the cassette are coated and hardened with an electroless deposit of nickel-phosphorous alloy.

REFERENCES:
patent: 4677042 (1987-06-01), Kato et al.
patent: 4738689 (1988-04-01), Gigl et al.
"Some Facts about Electroless Nickel Deposits", Acteron Corporation Fact Sheet, MIL-C-26074.

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