Charged-particle-beam projection-exposure apparatus and methods

Chuck, lithographic projection apparatus, method of...

Clamping device for optical elements, lithographic apparatus...

Collector configured of mirror shells

Condenser for photolithography system

Containment system for immersion fluid in an immersion...

Conveyor device for alignment

Coupling apparatus, exposure apparatus, and device...

Critical dimension control improvement method for step and...

Dampening system

Damping arrangement, active damping system, lithographic...

Detection apparatus and exposure apparatus using the same

Device and method for measuring reflective notch control in phot

Device and method for the alignment of masks

Device for exposing the peripheral area of a wafer

Device for exposure of a peripheral area

Device for exposure of a peripheral area of a film circuit...

Device for exposure of a peripheral area of a wafer

Device for holding a mask

Device for the projection copying of masks