Clamping device for optical elements, lithographic apparatus...

Details Clamping device for optical elements, lithographic apparatus... Clamping device for optical elements, lithographic apparatus...

2007-12-11

2007-12-11

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C359S819000

Reexamination Certificate

active

10992233

ABSTRACT:
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate. The apparatus includes an optical element, and at least two clamping assemblies for clamping the optical element. The clamping assemblies each include a first clamp with a first clamping surface in contact with a first surface of the optical element and a second clamp with a second clamping surface in contact with a second surface of said optical element, opposite said first surface of said optical element.

REFERENCES:
patent: 6386719 (2002-05-01), Lee
patent: 2002/0191654 (2002-12-01), Klene et al.
patent: 2003/0147160 (2003-08-01), Endoh et al.
patent: 2003/0211297 (2003-11-01), Rossing et al.
patent: 2004/0218289 (2004-11-01), Kino et al.

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