Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-12-30
2009-11-17
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000
Reexamination Certificate
active
07619715
ABSTRACT:
An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.
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Ono Kazuya
Shibazaki Yuichi
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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