Device for holding a mask

Details Device for holding a mask Device for holding a mask

1989-02-21

1990-10-16

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 74, 269 8, G03B 2742

Patent

active

049639218

ABSTRACT:
A device for detachably holding a mask at least a portion of which is made of a magnetic material. The device includes a holding member, on which the mask is to be held, the holding member having a portion made of a magnetic material; a first system for producing holding magnetic lines of force so as to generate a magnetic force between the magnetic portion of the holding member and the magnetic portion of the mask, to thereby hold the mask on the holding member; and a second system for producing releasing magnetic lines of force which are operative against the magnetic lines of force produced by the first system so as to reduce the same to a degree sufficient to disengage the mask from the holding member. Also, disclosed is a mask holding device for detachably holding a mask, typically for use in the manufacture of microcircuits, which device is arranged to hold the mask by use of a magnetically attracting force, the magnetically attracting force being made variably controllable so as to correct the flatness of the mask.

REFERENCES:
patent: 3428867 (1969-02-01), Becker
patent: 3740683 (1973-06-01), Benson
patent: 3978441 (1976-08-01), Sobottka et al.
patent: 3993509 (1976-11-01), McGinty
patent: 4418420 (1983-11-01), Bauer et al.
patent: 4720732 (1988-01-01), Tsutsui
patent: 4737824 (1988-04-01), Sakai et al.

Affiliated with

Also associated with

Rating

Device for holding a mask does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device for holding a mask, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for holding a mask will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-852995