Chuck, lithographic projection apparatus, method of...

Details Chuck, lithographic projection apparatus, method of... Chuck, lithographic projection apparatus, method of...

2005-03-08

2005-03-08

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C361S234000

Reexamination Certificate

active

06864957

ABSTRACT:
A lithographic projection apparatus with a chuck in which a dielectric element of the electrostatic chuck has a specific resistivity of at least 1016Ωcm so that once the potential difference between electrodes of the chuck is removed the force on the article to be clamped reduces below a predetermined minimum level quickly. The dielectric element also has a coefficient of thermal expansion of less than 0.02×10−6K−1. A method of manufacturing a chuck includes joining a first glass ceramic element with a second glass element with an electrode therebetween in which a current is passed through the second glass element.

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patent: 5954982 (1999-09-01), Sogard
patent: 6368942 (2002-04-01), Cardinale
patent: 6542224 (2003-04-01), Ackerman et al.
patent: 6549270 (2003-04-01), Ota
patent: 20020044267 (2002-04-01), Ackerman et al.
patent: 20020135969 (2002-09-01), Weldon et al.
patent: 1191581 (2002-03-01), None

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