Containment system for immersion fluid in an immersion...

Details Containment system for immersion fluid in an immersion... Containment system for immersion fluid in an immersion...

2006-06-12

2009-08-25

Lee, Diane I (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000, C355S077000

Reexamination Certificate

active

07580112

ABSTRACT:
A containment system contains an immersion fluid in an immersion area to fill a gap between a projection system and an object to be exposed with the immersion fluid. The containment system includes an immersion fluid barrier formed by a pressurized gas that is supplied to a location adjacent to the immersion area. A supply of the pressurized gas to the immersion fluid barrier is intermittently stopped during an exposure operation of the object.

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