Device and method for the alignment of masks

Details Device and method for the alignment of masks Device and method for the alignment of masks

1991-12-09

1992-11-03

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 91, 355 78, G03B 2742

Patent

active

051609592

ABSTRACT:
A device for aligning a flexible mask with a substrate when the substrate is mounted on a vacuum chuck member which includes a surround member surrounding the exposed surface of the substrate. The mask is held on a mask holder and the chuck member and mask holder are movable toward and away from each other. The surround member rests on a flexible element which effectively causes the surround member to float so that when the mask is brought into contact with the substrate, the mask always lies in the same plane as the exposed surface of the substrate and the exposed surface of the surround member and no distortion of the mask occurs.

REFERENCES:
patent: 4032233 (1977-06-01), Oscarsson et al.
patent: 4089603 (1978-05-01), Jacobs
patent: 4551016 (1985-11-01), Maher et al.
patent: 4888488 (1989-12-01), Miyake
patent: 4967230 (1990-10-01), Meacham

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