Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-11-11
2011-11-15
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
Reexamination Certificate
active
08059259
ABSTRACT:
An active damping system assembly is configured to dampen a vibration of at least part of a structure. The assembly includes a plurality of active dampers each including a sensor configured to measure a position quantity of an interface mass mounted on the structure; and an actuator configured to exert a force on the interface mass in dependency of a signal provided by the sensor, wherein each of the plurality of active damping systems is connected to the interface mass. The structure may be a projection system of a lithographic apparatus.
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Van Der Wijst et al., “Lithographic Apparatus, Projection Assembly and Active Damping”, U.S. Appl. No. 12/244,879, filed Oct. 3, 2008, 15 pgs.
Boschker Stijn
Butler Hans
De Hoon Cornelius Adrianus Lambertus
De Pee Joost
Van Der Wijst Marc Wilhelmus Maria
ASML Netherlands B.V.
Iacoletti Michelle
Nguyen Hung Henry
Sterne Kessler Goldstein & Fox P.L.L.C.
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