Device for the projection copying of masks

Details Device for the projection copying of masks Device for the projection copying of masks

1984-10-02

1986-10-28

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 43, G03B 2742

Patent

active

046195246

ABSTRACT:
To adjust a device for the projection copying of masks on a semiconductor substrate, adjustment marks are illuminated with wideband adjustment light in order to eliminate variations in the intensity of the reflected signal in the area of a mark field. The color defect created by the wideband nature of the ajustment light is determined by spectroscopic means and taken into account when making the adjustment.

REFERENCES:
patent: 4357100 (1982-11-01), Mayer et al.
patent: 4405229 (1983-09-01), Mayer

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