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Alignment system

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment system

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment system

Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent

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Alignment system

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Alignment system

Optics: measuring and testing – Angle measuring or angular axial alignment – With photodetection remote from measured angle
Patent

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Alignment system and lithographic apparatus equipped with...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment system and method for dish concentrators

Optics: measuring and testing – Angle measuring or angular axial alignment – With photodetection remote from measured angle
Patent

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Alignment system and method using bright spot and box structure

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment system and ophthalmic instrument incorporating the sam

Optics: measuring and testing – Range or remote distance finding – Triangulation ranging to a point with two or more projected...
Patent

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Alignment system for lithographic proximity printing

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment system for observation instruments

Optics: measuring and testing – Angle measuring or angular axial alignment – Star/sun/satellite position indication with photodetection
Reexamination Certificate

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Alignment system for optical lithography

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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Alignment system for spectroscopic analysis

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Reexamination Certificate

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Alignment system for use in lithography utilizing a spherical re

Optics: measuring and testing – By polarized light examination – With birefringent element
Patent

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Alignment system of semiconductor exposure apparatus and...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment system of wafer stage

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Alignment system with large area search for wafer edge and globa

Optics: measuring and testing – By alignment in lateral direction
Patent

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Alignment system, device and method

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Alignment target image enhancement for microlithography process

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment target to be measured with multiple polarization...

Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate

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