Alignment system for spectroscopic analysis

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation

Reexamination Certificate

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Details

C356S301000, C356S318000, C356S329000, C250S201100

Reexamination Certificate

active

07817268

ABSTRACT:
The present invention provides a spectroscopic system as well as a method of autonomous tuning of a spectroscopic system and a corresponding computer program product. By detecting the position of return radiation in a transverse plane of an aperture of a spectroscopic analysis unit, a control signal can be generated that allows to drive servo driven translation or tilting stages of optical components. In this way a transverse misalignment of a spectroscopic system can be effectively detected. Generally, a plurality of different detection schemes are realizable allowing for an autonomous tuning of the spectroscopic system and for autonomous elimination of misalignment of a spectroscopic system.

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patent: 02057758 (2002-07-01), None

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