Alignment system

Details Alignment system Alignment system

1996-12-16

2000-01-25

Hantis, K

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, 2505593, 355 53, G01B 1100

Patent

active

060183950

ABSTRACT:
An alignment method useable with an original having a pattern and a substrate having a surface area on which the pattern of the original is printed. The alignment method comprises detecting plural marks, calculating plural times, the amount of rotational deviation on the basis of different combinations of marks, calculating the quantity of rotational correction of the original and the substrate by using the computed rotational deviations, and aligning on the basis of the calculated quantity of the rotational deviation.

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patent: 4958160 (1990-09-01), Ito et al.
patent: 5182615 (1993-01-01), Kurosawa et al.

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