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High thermal stability plane mirror interferometer

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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High throughput across-wafer-variation mapping

Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate

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High throughput brightfield/darkfield wafer inspection...

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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High throughput brightfield/darkfield wafer inspection...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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High throughput brightfield/darkfield wafer inspection...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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High throughput brightfield/darkfield wafer inspection...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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High throughput brightfield/darkfield wafer inspection...

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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High throughput brightfield/darkfield water inspection...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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High throughput darkfield/brightfield wafer inspection...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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High throughput inspection system and method for generating...

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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High throughput inspection system and method for generating...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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High throughput photoreflectance technique and apparatus

Optics: measuring and testing – Of light reflection
Patent

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High throughput surface plasmon resonance analysis system

Optics: measuring and testing – Of light reflection
Patent

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High transmission multi-wavelength filter and method

Optics: measuring and testing – By polarized light examination – With polariscopes
Reexamination Certificate

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High-accuracy air refractometer utilizing two nonlinear optical

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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High-accuracy high-stability method and apparatus for measuring

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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High-accuracy pattern shape evaluating method and apparatus

Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate

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High-accuracy pattern shape evaluating method and apparatus

Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate

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High-accuracy pattern shape evaluating method and apparatus

Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate

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High-accuracy wavemeter

Optics: measuring and testing – By shade or color – With color transmitting filter
Reexamination Certificate

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