Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-03-06
2007-03-06
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S239800
Reexamination Certificate
active
11127914
ABSTRACT:
Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
REFERENCES:
patent: 5191393 (1993-03-01), Hignette et al.
patent: 5386112 (1995-01-01), Dixon
patent: 5572598 (1996-11-01), Wihl et al.
patent: 5892579 (1999-04-01), Elyasaf et al.
patent: 6175645 (2001-01-01), Elyasaf et al.
patent: 2002/0012376 (2002-01-01), Das et al.
patent: 0 557 227 (1993-08-01), None
patent: 0 819 933 (1998-01-01), None
Masaki Toshimichi, , Patent Abstracts of Japan,Device and Method for Processing Image and Inspecting Method,Omron Corp, Pub. No. 2001101416, Appl. No. 11278865, Publication Date Apr. 13, 2001.
Elyasaf Emanuel
Feldman Haim
Lahat Eitan
Yalov Simon
Applied Materials Israel, Ltd.
Fahmi Tarek N.
Rosenberger Richard A.
LandOfFree
High throughput inspection system and method for generating... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High throughput inspection system and method for generating..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High throughput inspection system and method for generating... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3729127