High throughput photoreflectance technique and apparatus

Optics: measuring and testing – Of light reflection

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

356417, 356432, G01N 2155

Patent

active

059824999

ABSTRACT:
A plurality of PR measurements are simultaneously made at N different spots on a wafer by forming N modulated pump beams and N tunable probe beams, and directing one pump beam and one probe beam so as to form overlapping images at each of the N spots. Each of a like plurality of N photodetectors receives a portion of the corresponding probe beam which is reflected from the surface of the wafer to provide information about the wafer characteristics at each spot. In one embodiment, automatic alignment of the probe and pump beams along a row of N spots is achieved by means of a semi-cylindrical scan head which has an axial cavity overlapping the row of N spots and a plurality of radial cavities organized into separate, but interleaved input and output groups. The cavities of two separate input groups receive optical fibers carrying the probe and pump beams to the row of N spots. The cavities of two separate output groups receive photodetectors for detecting the reflected beam and for monitoring the pump beam. The scan head and/or the wafer are moved relative to one another in order to make measurements at various row locations on the wafer (e.g., to map the wafer).

REFERENCES:
patent: 5255070 (1993-10-01), Pollack et al.
patent: 5255071 (1993-10-01), Pollack et al.
patent: 5260772 (1993-11-01), Pollack et al.
patent: 5270797 (1993-12-01), Pollak et al.
patent: 5287169 (1994-02-01), Pollack et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

High throughput photoreflectance technique and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High throughput photoreflectance technique and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High throughput photoreflectance technique and apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1463884

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.