Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2005-08-16
2005-08-16
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
C356S239100
Reexamination Certificate
active
06930770
ABSTRACT:
Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
REFERENCES:
patent: 5572598 (1996-11-01), Wihl et al.
patent: 5892579 (1999-04-01), Elyasaf et al.
Elyasaf Emanuel
Feldman Haim
Lahat Eitan
Yalov Simon
Applied Materials Israel, Ltd.
Barth Vincent P.
Blakely & Sokoloff, Taylor & Zafman
Rosenberger Richard A.
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