Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate
2007-06-12
2007-06-12
Nguyen, Sang H. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
Triangulation
C356S600000, C356S601000, C356S237200, C250S310000, C250S492300
Reexamination Certificate
active
11322559
ABSTRACT:
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
REFERENCES:
patent: 5896188 (1999-04-01), McCullough
patent: 5969357 (1999-10-01), Todokoro et al.
patent: 6411377 (2002-06-01), Noguchi et al.
patent: 6473162 (2002-10-01), Masaki et al.
patent: 6516528 (2003-02-01), Choo et al.
patent: 6909791 (2005-06-01), Nikitin et al.
patent: 6929892 (2005-08-01), Shishido et al.
patent: 7049589 (2006-05-01), Yamaguchi et al.
patent: 2003/0021463 (2003-01-01), Yamaguchi et al.
patent: 2005/0275850 (2005-12-01), Bischoff et al.
Proceedings of SPIE 5375 (2004), pp. 468-476.
Proceedings of SPIE 5375 (2004), pp. 515-533.
Fukuda Hiroshi
Kawada Hiroki
Komuro Osamu
Yamaguchi Atsuko
Hitachi High-Technologies Corporation
Nguyen Sang H.
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