Apparatus and method for color filter inspection

Apparatus and method for measuring amount of projection of...

Apparatus for the determination of surface properties

Bright and dark field scatterometry systems for line...

Defect detection system

Device and method for determining the properties of surfaces

Device and method for the determination of the quality of...

Device for examining the optical properties of surfaces

Device for the examination of optical properties of surfaces

Displacement and flatness measurements by use of a laser...

Edge roughness measurement in optical metrology

Flatness measuring apparatus

High-order high-frequency rough surface scattering solver

Method and apparatus for detecting media type

Method and apparatus for determining out-of-plane defects in...

Method and device for surface evaluation

Method and measuring arrangement for measuring paper surface

Method and measuring arrangement for measuring paper surface

Method for measuring surface properties and co-ordinate...

Method for verifying scan precision of a laser measurement...