Method for verifying scan precision of a laser measurement...

Details Method for verifying scan precision of a laser measurement... Method for verifying scan precision of a laser measurement...

2007-08-14

2007-08-14

Phan, James (Department: 2872)

Optics: measuring and testing

Surface roughness

C359S226200, C359S900000, C356S608000

Reexamination Certificate

active

11308319

ABSTRACT:
A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a transparent flat, of which the flatness of each plane is regarded as a flatness conventional true value; determining an optimum scanning mode; determining optimum scanning parameters under the optimum scanning mode; scanning the transparent flat under the optimum scanning mode and the optimum scanning parameters for certain times, and obtaining measuring data; calculating a plurality of flatness values using the measuring data; calculating an average value and a standard deviation of the flatness values, and a bias between the average value and the flatness conventional true value; evaluating the repetitiveness of the laser measurement machine according to the standard deviation; and evaluating the veracity of the laser measurement machine according to the bias.

REFERENCES:
patent: 3866038 (1975-02-01), Korth
patent: 6323952 (2001-11-01), Yomoto et al.
patent: 2001/0024309 (2001-09-01), Shim

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