Displacement and flatness measurements by use of a laser...

Details Displacement and flatness measurements by use of a laser... Displacement and flatness measurements by use of a laser...

2005-11-22

2009-06-16

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Surface roughness

Reexamination Certificate

active

07548323

ABSTRACT:
A laser beam system for measuring an aspect of a surface wherein a laser beam is reshaped into a corrected shaped laser beam having a corrected energy profile and subsequently reshaped into a measurement shaped laser beam having an measurement energy profile shaped to be effected by the at least one aspect of the surface. The measurement shaped laser beam is reflected from the surface, being modified by the aspect of interest of the surface, and to a sensor array wherein the sensors measure the reflected laser beam to determine the aspect of interest of the surface.

REFERENCES:
patent: 5153844 (1992-10-01), Beni et al.
patent: 5781269 (1998-07-01), Ito et al.
patent: 2002/0135774 (2002-09-01), De Groot
patent: 08-124828 (1996-05-01), None
patent: 2001-210261 (2001-08-01), None

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