Optics: measuring and testing – Surface roughness
Reexamination Certificate
2008-11-20
2011-10-25
Ton, Tri T (Department: 2877)
Optics: measuring and testing
Surface roughness
C356S601000
Reexamination Certificate
active
08045179
ABSTRACT:
Line edge roughness or line width roughness of a feature on a sample may be determined from incident radiation scattered from the feature. An amount of ordered scattered radiation characterized by a discrete diffraction order is determined and a diffuse scattered radiation signal is measured. A ratio between an intensity of the ordered scattered incident radiation and an intensity of the diffuse scattered radiation signal is determined. The line edge roughness or line width roughness is determined from the ratio.
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Fielden John
Poslavsky Leonid
Spielman Steven R.
Wack Daniel C.
Zhuang Guorong Vera
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
Ton Tri T
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