Method for measuring surface properties and co-ordinate...

Details Method for measuring surface properties and co-ordinate... Method for measuring surface properties and co-ordinate...

2007-06-05

2007-06-05

Nguyen, Sang H. (Department: 2877)

Optics: measuring and testing

Surface roughness

C356S609000, C356S614000, C033S503000, C033S559000, C250S566000

Reexamination Certificate

active

10480646

ABSTRACT:
A method and apparatus for measuring surface properties of a workpiece in an extremely precise manner by means of a co-ordinate measuring device (10), independently from the material properties of the workpiece. A molded probe element is used which can be displaced along coordinate axes (X, Y, Z), and an optical sensor detects the movement of the probe element on the surface of the workpiece. The optical sensor is an optoelectronic distance sensor, and the molded probe element is displaceably arranged in relation to the distance sensor in such a way that the distance sensor optionally directly measures the surface, or the position of the molded probe element.

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