Apparatus and method for color filter inspection

Details Apparatus and method for color filter inspection Apparatus and method for color filter inspection

2006-05-18

2008-10-21

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Surface roughness

C356S239200

Reexamination Certificate

active

07440118

ABSTRACT:
The present invention provides an apparatus and method for detecting flatness and/or unevenness of a surface of an overcoat layer on a colored pixel layer of a color filter with a high degree of accuracy. The apparatus includes: a light source34, placed almost directly above the surface of a plate30, for emitting an emission-line spectrum corresponding to at least one color of coloring particles in a color filter32; a photo-receiver36, placed obliquely upward with respect to the surface of the plate30and having a spectral sensitivity corresponding to the emission-line spectrum of the light source, for receiving reflected light from the color filter32on the plate30during inspection; and a detection means42for creating a brightness distribution for a color using a color signal output from the photo-receiver36as corresponding to its spectral sensitivity to detect the flatness (unevenness) of the surface of an overcoat layer16.

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