Device and method for determining the properties of surfaces

Optics: measuring and testing – Surface roughness

Reexamination Certificate

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C356S425000, C356S405000, C356S406000, C356S402000

Reexamination Certificate

active

10854926

ABSTRACT:
A method for determining the properties of surfaces wherein a first process step specified radiation emits from at least one radiation source to a measuring surface, in further process steps the radiation reflected and/or scattered off the measuring surface is detected by a plurality of image-capturing components, and a signal is generated which specifies at least one parameter of the radiation detected by the image-capturing components. In further process steps the first signals are grouped based on predetermined criteria to form group signals, and at least one group-specific evaluation figure is computed, and a dependent statistical parameter correlating with at least one measuring surface remission characteristic. Finally at least one statistical parameter is read out in dependence on the predetermined criterion for grouping said first signals. The properties of the surface are specified by a relation between at least two statistical parameters.

REFERENCES:
patent: 4976545 (1990-12-01), Kipphan et al.
patent: 6263291 (2001-07-01), Shakespeare et al.
patent: 7006229 (2006-02-01), Sperling et al.

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