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Scatterometry of grating structures to monitor wafer stress

Optics: measuring and testing – Material strain analysis
Reexamination Certificate

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Self-calibrating optical fiber pressure, strain and temperature

Optics: measuring and testing – Material strain analysis – By light interference detector
Patent

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Shearing optical element for interferometric analysis system

Optics: measuring and testing – Material strain analysis – By light interference detector
Patent

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Single mode optical fiber polarimetric stress sensor having opti

Optics: measuring and testing – Material strain analysis – With polarized light
Patent

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Single wave linear interferometric force transducer

Optics: measuring and testing – Material strain analysis – By light interference detector
Patent

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Spatially resolving fiber-optic crosstalk strain sensor

Optics: measuring and testing – Material strain analysis
Patent

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Strain measurement

Optics: measuring and testing – Material strain analysis – With polarized light
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Stress and strain measuring apparatus and method

Optics: measuring and testing – Material strain analysis – With polarized light
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Stress evaluation apparatus

Optics: measuring and testing – Material strain analysis
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Stress measurement method

Optics: measuring and testing – Material strain analysis
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Stress measuring method and instrument

Optics: measuring and testing – Material strain analysis – With polarized light
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Stress sensor

Optics: measuring and testing – Material strain analysis – With polarized light
Patent

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Surface form measuring apparatus and stress measuring...

Optics: measuring and testing – Material strain analysis
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Surface imaging skin friction instrument and method

Optics: measuring and testing – Material strain analysis – By light interference detector
Patent

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Surface strain measuring device

Optics: measuring and testing – Material strain analysis
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Surface topology inspection

Optics: measuring and testing – Material strain analysis – By light interference detector
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System and method for detecting local mechanical stress in...

Optics: measuring and testing – Material strain analysis
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System and method for measuring engine rotor thrust using Fabry-

Optics: measuring and testing – Material strain analysis – By light interference detector
Patent

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System and method for measuring the interface tensile strength o

Optics: measuring and testing – Material strain analysis – By light interference detector
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System and method for optimizing heat management

Optics: measuring and testing – Material strain analysis
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