Stress measurement method

Details Stress measurement method Stress measurement method

2007-10-09

2009-11-24

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Material strain analysis

C702S043000

Reexamination Certificate

active

07623223

ABSTRACT:
An object of this invention is to provide stress measurement method that is stress of the measuring object nondestructively in a short period of time.In order to attain this object, the stress measurement apparatus1comprises a correlation data storage section41that analyzes a correlation between reference stress related data obtained from a Raman spectrum L of an entire predetermined area W1of a reference specimen W and local stress originated data as being data obtained based on a local stress each of which applies to multiple positions WS1˜WSnrespectively in the predetermined area W1and stores correlation data indicating the correlation, a data obtaining section42that obtains measurement stress related data from a Raman spectrum L on an entire measurement area W1′, corresponding to the predetermined area W1, of a measurement specimen WS′, and a calculation section43that calculates local stress originated data in the measurement area W1′ based on the correlation data and the measurement stress related data.

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