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Defect inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Defect inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Defect inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection apparatus and defect inspection method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect inspection apparatus and defect inspection method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection apparatus and its method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect inspection apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect inspection apparatus for phase shift mask

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection apparatus for silicon wafer

Optics: measuring and testing – Inspection of flaws or impurities
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Defect inspection apparatus for silicon wafer

Optics: measuring and testing – Inspection of flaws or impurities
Patent

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Defect inspection device for metal ring end faces of a...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect inspection method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Defect inspection method and apparatus for silicon wafer

Optics: measuring and testing – Inspection of flaws or impurities
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Defect inspection method and apparatus for silicon wafer

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection method and apparatus for transparent...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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Defect inspection method and apparatus therefor

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection method and apparatus therefor

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection method and apparatus therefor

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspection method and defect inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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