Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-07-31
2007-07-31
Nguyen, Sang H. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C250S341800, C250S339110, C356S237100
Reexamination Certificate
active
10971109
ABSTRACT:
A defect inspection apparatus for inspecting a fine circuit pattern with high resolution to detect a defective portion is constructed to have an objective lens for detecting an image of a sample, a laser illumination unit for illuminating the sample through the objective lens, a unit for reducing the coherence of the laser illumination, an accumulation type detector, and a unit for processing the detected image signal.
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Maeda Shunji
Nakata Toshihiko
Shibata Yukihiro
Shishido Hiroaki
Uto Sachio
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Nguyen Sang H.
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