Defect inspection apparatus and its method

Details Defect inspection apparatus and its method Defect inspection apparatus and its method

2011-05-10

2011-05-10

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237400

Reexamination Certificate

active

07940385

ABSTRACT:
In a defect inspection apparatus for performing an inspection with an optical system, the dimension of a defect is measured substantially concurrently with detection of the defect. In order to promote the accuracy of measurement of the defect dimension, a correction unit is provided which corrects the defect dimension by using a standard sample such as a standard particle.

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