Defect inspection apparatus

Details Defect inspection apparatus Defect inspection apparatus

2007-08-24

2011-12-13

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Reexamination Certificate

active

08077306

ABSTRACT:
A high speed defect inspection apparatus has a high-speed detector that includes a plurality of image sensors. The image sensors are arranged with gaps between them in the pixel direction to form two lines. The image sensors are arranged in a zigzag pattern so that they are not contiguous to each other in the scanning direction. The development cost is reduced by using an arrangement of a plurality of small-area image sensors. When an image sensor is installed, it is necessary to furnish a region required for installation. Since individual image sensors need to be arranged at fixed intervals, void regions result. A plurality of image sensors are arranged in a zigzag pattern to solve the void region problem.

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