Defect inspection apparatus

Details Defect inspection apparatus Defect inspection apparatus

2005-10-11

2005-10-11

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

06954268

ABSTRACT:
The present invention provides a defect inspection apparatus comprising an inspection section which inspects a front surface and a rear surface of a sample, a control section which processes image data on the front surface and rear surface of the sample obtained by the inspection section, moving section provided in the inspection section and capable of reciprocating the sample, illumination section which illuminates the front surface and rear surface of the sample moved by the moving section, and image pickup section which picks up images of the front surface and rear surface of the sample illuminated by the illumination section, wherein at least one of an incidence angle of the illumination section on the sample and an image pickup angle of the image pickup section to the sample is changeable.

REFERENCES:
patent: 4875780 (1989-10-01), Moran et al.
patent: 5359407 (1994-10-01), Suzuki et al.
patent: 6559938 (2003-05-01), Smedt
patent: 6594012 (2003-07-01), Takeuchi et al.
patent: 6606154 (2003-08-01), Oda
patent: 6621571 (2003-09-01), Shishido et al.
patent: 62-42039 (1987-02-01), None
patent: 4-304651 (1992-10-01), None
patent: 5-64760 (1993-08-01), None
patent: 8-125004 (1996-05-01), None
patent: 9-61365 (1997-03-01), None
patent: 9-061365 (1997-03-01), None
patent: 11-051874 (1999-02-01), None
patent: 11-219990 (1999-08-01), None
patent: 11-219990 (1999-08-01), None
patent: 2000-90206 (2000-03-01), None

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