Defect inspection apparatus

Details Defect inspection apparatus Defect inspection apparatus

1995-04-24

1995-12-05

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356430, 250237R, 25055945, G01N 2189

Patent

active

054734266

ABSTRACT:
An apparatus includes a light source for emitting a light beam, a light beam expander for expanding the light beam in a predetermined direction, and radiating the expanded light beam onto an object to be inspected, a scanning device for moving the object to be inspected relative to the light beam to be radiated onto the object to be inspected, and a photodetector for photoelectrically converting scattered light generated from a defect (including foreign matter) on the object to be inspected, and inspects the defect on the basis of a photoelectric conversion signal obtained from the photodetector. A light-shielding plate having a plurality of edges for limiting the light beam expanded by the light beam expander at the two end portions, in the expansion direction, of the light beam is arranged, and at least one of the plurality of edges is formed to be transverse to the relative scanning direction (Y direction).

REFERENCES:
patent: 3799679 (1974-03-01), Simko
patent: 4160913 (1979-07-01), Brenholdt
patent: 4988204 (1991-01-01), Sakaguchi et al.
patent: 5072128 (1991-12-01), Hayano et al.

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