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Method of detecting posture of object and apparatus using...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of determining material using intensity of light

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of determining the depth profile of a surface...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of dry etching a sample and dry etching system

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of fabricating and inspecting a transparent optical...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of full-color optical coherence tomography

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of full-color optical coherence tomography

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of full-color optical coherence tomography

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of improving registration accuracy and method of...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of interferometry with modulated optical path-length...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of investigating vibrations and an apparatus therefor

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of manufacturing an optical element

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of manufacturing an optical element

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of manufacturing an optical element using a hologram

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of measuring deep trenches with model-based optical...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of measuring depths of structures on a semiconductor...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of measuring micro-structure, micro-structure...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of measuring overlay

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of measuring overlay

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of measuring properties of particles and...

Optics: measuring and testing – By light interference – For dimensional measurement
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