Method of determining the depth profile of a surface...

Details Method of determining the depth profile of a surface... Method of determining the depth profile of a surface...

2007-08-30

2010-10-12

Lee, Hwa S. A (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07812966

ABSTRACT:
According to one embodiment of the present invention, a method of determining the depth profile of a surface structure includes: irradiating the surface structure with irradiation light including light components of different wavelengths; and determining the depth profile of the surface structure in dependence on interferometric effects caused by the reflection of the irradiation light at the surface structure.

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