Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-09-28
2010-06-15
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07738117
ABSTRACT:
A method of manufacturing an optical element involves an interferometric test of the optical element using an interferometer system of a Fizeau type combined with principles of white-light interferometry. The optical element is disposed in a cavity between a Fizeau surface and a mirror, and an optical path difference between a back surface of the optical element and the mirror is determined for determining parameters of the optical element, such as a thickness thereof. Measuring light from an optical delay apparatus can be supplied to the Fizeau interferometer through an optical fiber.
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Altenberger Michael
Doerband Bernd
Willkens Thomas
Carl Zeiss SMT AG
Lyons Michael A
Sughrue & Mion, PLLC
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