Method of manufacturing an optical element

Details Method of manufacturing an optical element Method of manufacturing an optical element

2004-05-14

2010-06-01

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07728987

ABSTRACT:
A method of manufacturing an optical element includes testing the optical element by using an interferometer optics generating a beam of measuring light illuminating only a sub-aperture of the tested optical element. The interferometer optics comprises a hologram. Results of the sub-aperture measurement are stitched together to obtain a measuring result with respect to the full surface of the optical element. Further, a method of calibrating the interferometer optics includes performing an interferometric measurement using a calibrating optics having a hologram covering only a sub-aperture of the full cross section of the beam of measuring light generated by the interferometer optics and stitching together the sub-aperture measurements to obtain a result indicative for the full cross section of the interferometer optics.

REFERENCES:
patent: 4340306 (1982-07-01), Balasubramanian
patent: 4732483 (1988-03-01), Biegen
patent: 4758089 (1988-07-01), Yokokura et al.
patent: 5361312 (1994-11-01), Kuchel
patent: 5473434 (1995-12-01), de Groot
patent: 5488477 (1996-01-01), de Groot
patent: 5548403 (1996-08-01), Sommargren
patent: 5777741 (1998-07-01), Deck
patent: 5982490 (1999-11-01), Ichikawa et al.
patent: 7061626 (2006-06-01), Schillke et al.
patent: 2002/0063867 (2002-05-01), Otto
patent: 2003/0002048 (2003-01-01), Zanoni
patent: 2003/0117632 (2003-06-01), Golini et al.
patent: 2003/0128368 (2003-07-01), Kuchel
patent: 2003/0184762 (2003-10-01), Kim et al.
patent: 2004/0174531 (2004-09-01), Freimann
patent: 2005/0083537 (2005-04-01), Kuchel
patent: 2005/0275849 (2005-12-01), Freimann et al.
patent: 8-110214 (1996-04-01), None
patent: 2002/011656 (2002-01-01), None
patent: 2002-011656 (2002-01-01), None
patent: 2003057016 (2003-02-01), None
patent: WO 03/040650 (2003-05-01), None
patent: WO 2004/046641 (2004-06-01), None
International Search Report of PCT/EP2004/005194, Jan. 28, 2005, Carl Zeiss SMT AG.
Bray, “Stitching Interferometer for Large Plano Optics Using a Standard Interferometer,” SPIE; 3134:39-50 (1997).
Bray, “Stitching Interferometer for Large Optics Using a Standard Interferometer. Description of an Automated System,” SPIE, 3047:911-918 (1997).
Bray, “Stitching Interferometer for Large Optics: Recent Developments of a System,” SPIE, 3492:946-956 (1999).
Bray, “Stitching Interferometry: How and Why It Works,” SPIE, 3739:259-273 (1999).
Bray, “Stitching Interferometry: Side Effects and PSD”, SPIE, 3782:443-452 (1999).
Bray, “Stitching Interferometry for the Wavefront Metrology of X-Ray Mirrors,” SPIE, 4501:63-67 (2001).
Bray, “Stitching Interferometry and Absolute Surface Shape Metrology: Similarities,” SPIE, 4451:375-383 (2001).
Hansel et al., “Stitching Interferometry of Aspherical Surfaces,” SPIE, 4449:265-275 (2001).
Freimann et al., “Absolute Measurement of Non-Comatic Aspheric Surface Errors,” Optics Communications, 161:106-114(1999).
MacGovern et al., “Computer Generated Holograms for Testing Optical Elements,” 10(3):619-624 (1971).
Malacara, Optical Shop Testing, 2ndEd., John Wiley & Sons, Inc., Chapters 2.1, 2.6, and 12 (1992).
Naulleau et al., “Extreme-Ultraviolet Phase-Shifting Point-Diffraction Interferometer: A Wave-Front Metrology Tool with Subangstrom Reference-Wave Accuracy,” 38(35):7252-7263 (1999).

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