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MEMS micromirror devices with anti-reflective structures

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS mirror and method of fabrication

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS mirror device and optical disk apparatus

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS mirror with amplified motion

Optical: systems and elements – Optical modulator – Light wave directional modulation
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MEMS mirror with drive rotation amplification of mirror...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS mirror with drive rotation amplification of mirror...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS mirror with parallel springs and arched support for beams

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS optical components

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS optical components

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS optical switch with self-assembly structure

Optical: systems and elements – Optical modulator – Light wave directional modulation
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MEMS reflectors having tail portions that extend inside a...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS scanning mirror with trenched surface and I-beam like...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS structure with raised electrodes

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS structure with surface potential control

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS switch and method of fabricating the same

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Mems switch and method of fabricating the same

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS switch with set and latch electrodes

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS switch with set and latch electrodes

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS variable optical attenuator

Optical: systems and elements – Optical modulator
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Mems variable optical delay lines

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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