Optical: systems and elements – Optical modulator – Light wave directional modulation
Reexamination Certificate
2006-11-07
2006-11-07
Spector, David N. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave directional modulation
C385S017000, C385S018000
Reexamination Certificate
active
07133185
ABSTRACT:
A self-assembly structure of micro electromechanical optical switch utilizes residual stresses of three curved beams. The first curved beam pushes the base plate away from the substrate. The second curved beam lifts up the mirror slightly. Then, the third curved beam rotates the mirror vertical to the base plate and achieves self-assembly. In another embodiment, magnetic force and magnetic-activated elements are used.
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Chien Yu-Han
Kuo Wu-Cheng
Lee Hsiao-Wen
Wen Shih-Yi
Weng Chen-Yu
Industrial Technology Research Institute
Spector David N.
Welsh & Katz
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