MEMS mirror with drive rotation amplification of mirror...

Details MEMS mirror with drive rotation amplification of mirror... MEMS mirror with drive rotation amplification of mirror...

2006-03-07

2006-03-07

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100, C359S224200

Reexamination Certificate

active

07009755

ABSTRACT:
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of rotational teeth extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

REFERENCES:
patent: 6817725 (2004-11-01), Mizuno et al.
Yoda et al., “A MEMS 1-D Optical Scanner for Laser Projection Display using Self-Assebmed Vertical Combs and Scan-Angle Magnifying Mechanism,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, Jun. 5-0, 2005, pp. 968-971.

Affiliated with

Also associated with

Rating

MEMS mirror with drive rotation amplification of mirror... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS mirror with drive rotation amplification of mirror..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS mirror with drive rotation amplification of mirror... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3549431