MEMS mirror with drive rotation amplification of mirror...

Details MEMS mirror with drive rotation amplification of mirror... MEMS mirror with drive rotation amplification of mirror...

2006-01-10

2006-01-10

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S224200, C359S225100, C359S871000, C359S872000

Reexamination Certificate

active

06985279

ABSTRACT:
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.

REFERENCES:
patent: 6817725 (2004-11-01), Mizuno et al.

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