MEMS switch with set and latch electrodes

Details MEMS switch with set and latch electrodes MEMS switch with set and latch electrodes

2005-09-23

2008-11-04

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100, C359S291000, C359S292000, C359S295000, C359S298000

Reexamination Certificate

active

07446927

ABSTRACT:
A MEMS device is electrically actuated with a voltage placed across a first electrode (702) and a moveable material (714). The device may be maintained in an actuated state by latch electrodes (730a,730b) that are separate from the first electrode.

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