MEMS switch with set and latch electrodes

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S223100, C359S291000, C359S292000, C359S295000, C359S298000

Reexamination Certificate

active

07911677

ABSTRACT:
A MEMS device is electrically actuated with a voltage placed across a first electrode and a moveable material. The device may be maintained in an actuated state by latch electrodes that are separate from the first electrode.

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