MEMS scanning mirror with trenched surface and I-beam like...

Details MEMS scanning mirror with trenched surface and I-beam like... MEMS scanning mirror with trenched surface and I-beam like...

2006-05-16

2006-05-16

Epps, Georgia (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

07046421

ABSTRACT:
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

REFERENCES:
patent: 6914711 (2005-07-01), Novotny et al.
patent: 2005/0002085 (2005-01-01), Matsui

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