MEMS switch and method of fabricating the same

Details MEMS switch and method of fabricating the same MEMS switch and method of fabricating the same

2007-07-31

2007-07-31

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C333S105000, C333S262000

Reexamination Certificate

active

11258196

ABSTRACT:
A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.

REFERENCES:
patent: 6307169 (2001-10-01), Sun et al.
patent: 7049904 (2006-05-01), Shin
patent: 2001-143595 (2001-05-01), None

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