MEMS mirror with parallel springs and arched support for beams

Details MEMS mirror with parallel springs and arched support for beams MEMS mirror with parallel springs and arched support for beams

2007-11-27

2007-11-27

Dang, Hung (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S225100

Reexamination Certificate

active

11263795

ABSTRACT:
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.

REFERENCES:
patent: 6735004 (2004-05-01), Hagelin et al.
patent: 7095156 (2006-08-01), Yoda
patent: 2005-181394 (2005-07-01), None

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